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Tris(trimethylsilyl) phosphate

Also known as: Phosphoric acid tris(trimethylsilyl) ester, Phosphoric acid, TMS, Phosphoric acid, triTMS, Phosphoric acid, tristrimethylsilyl, Silanol, trimethyl-, phosphate (3:1), Trimethyl silyl phosphate, TMSP

Tris(trimethylsilyl) phosphate (CAS 10497-05-9) is a compound in the Organic Acids category listed in the Jingsj chemical database. It has the molecular formula C9H27O4PSi3 and a molecular weight of 314.53900 g/mol. Key properties include a melting point of 3-4 °C(lit.), a boiling point of 228-229 °C720 mm Hg(lit.), a density of 0.945 g/mL at 25 °C(lit.) and a flash point of 24.4 °C. It is classified under GHS with signal word Danger and hazard statements H225 — Highly flammable liquid and vapour, H315 — Causes skin irritation and H319 — Causes serious eye irritation. No supplier offers are currently listed; request a quote. Record last updated Nov 2, 2026.

CAS No.
10497-05-9
Jingsj CID
J-6724-3
Molecular Formula
C9H27O4PSi3
Molecular Weight
314.53900 g/mol
Category
Organic Acids
Last updated
11/2/2026

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Physicochemical Properties

Melting Point3-4 °C(lit.)
Boiling Point228-229 °C720 mm Hg(lit.)
Density0.945 g/mL at 25 °C(lit.)
Flash Point24.4 °C
Exact Mass314.09500
PSA54.57000
LogP4.64900
Vapor Pressure0.0977mmHg at 25°C
Refractive Indexn20/D 1.409(lit.)

GHS Safety & Compliance

Flammable / IrritantSignal word: Danger
  • H225 — Highly flammable liquid and vapour
  • H315 — Causes skin irritation
  • H319 — Causes serious eye irritation
  • H335 — May cause respiratory irritation

Customs & Trade Information

HS Code2931900090
Summary2931900090. other organo-inorganic compounds. VAT:17.0%. Tax rebate rate:13.0%. Supervision conditions:AB(certificate of inspection for goods inward,certificate of inspection for goods outward). MFN tariff:6.5%. General tariff:30.0%

Frequently Asked Questions

What is the CAS number of Tris(trimethylsilyl) phosphate?

The CAS number of Tris(trimethylsilyl) phosphate is 10497-05-9.

What are the molecular formula and molecular weight of Tris(trimethylsilyl) phosphate?

Tris(trimethylsilyl) phosphate has molecular formula C9H27O4PSi3 and molecular weight 314.53900 g/mol.

Is Tris(trimethylsilyl) phosphate hazardous?

Tris(trimethylsilyl) phosphate has GHS signal word Danger and hazard statements H225 — Highly flammable liquid and vapour; H315 — Causes skin irritation; H319 — Causes serious eye irritation.

What are the upstream and downstream products of Tris(trimethylsilyl) phosphate?

For Tris(trimethylsilyl) phosphate, Upstream Products: Hexamethyldisiloxane, 1,1,1,3,3,3-Hexamethyldisilazane, bis(trimethylsilyl) sulfide; Downstream Products: Azidotrimethylsilane, Bromotrimethylsilane, Trimethylfluorosilane.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated:

How to cite: Jingsj. "Tris(trimethylsilyl) phosphate (CAS 10497-05-9)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-6724-3 (accessed 2026-11-09).

Data for reference only; verify product details with suppliers before purchase.