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trimethylsilyl dihydrogen phosphate

Also known as: Phosphorsaeure-mono-trimethylsilylester, Silanol, 1,1,1-trimethyl-, 1-(dihydrogen phosphate), Silanol, trimethyl-, dihydrogen phosphate, Silanol,trimethyl-,dihydrogen phosphate, Trimethyl-phosphonooxy-silan, Trimethylsilyl-hydrogen-phosphat, phosphoric acid mono-trimethylsilanyl ester, trimethylsilylphosphate

trimethylsilyl dihydrogen phosphate (CAS 7422-66-4) is a compound in the Organic Acids category listed in the Jingsj chemical database. It has the molecular formula C3H11O4PSi and a molecular weight of 170.17600 g/mol. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.
7422-66-4
Jingsj CID
J-991689-6
Molecular Formula
C3H11O4PSi
Molecular Weight
170.17600 g/mol
Category
Organic Acids
Last updated
8/21/2026
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Physicochemical Properties

Exact Mass170.01600
PSA76.57000
LogP0.93060

Frequently Asked Questions

What is the CAS number of trimethylsilyl dihydrogen phosphate?

The CAS number of trimethylsilyl dihydrogen phosphate is 7422-66-4.

What are the molecular formula and molecular weight of trimethylsilyl dihydrogen phosphate?

trimethylsilyl dihydrogen phosphate has molecular formula C3H11O4PSi and molecular weight 170.17600 g/mol.

What are the upstream and downstream products of trimethylsilyl dihydrogen phosphate?

For trimethylsilyl dihydrogen phosphate, Upstream Products: Chlorotrimethylsilane, Tris(trimethylsilyl) phosphate.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated:

How to cite: Jingsj. "trimethylsilyl dihydrogen phosphate (CAS 7422-66-4)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-991689-6 (accessed 2026-11-09).

Data for reference only; verify product details with suppliers before purchase.