Trimethylfluorosilane

三甲基氟硅烷

Also known as: Fluoro(trimethyl)silane, Trimethylsilyl fluoride, Fluorotrimethylsilane, Silane, fluorotrimethyl-, Me3SiF

CAS No.
420-56-4
Jingsj CID
J-41013-9
Molecular Formula
C3H9FSi
Chinese Name
三甲基氟硅烷
Molecular Weight
92.188 g/mol
Category
Aliphatic Hydrocarbons
Last updated
8/21/2026

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Physicochemical Properties

Melting Point−74 °C(lit.)
Boiling Point16.0±0.0 °C at 760 mmHg
Density0.8±0.1 g/cm3
Flash Point-24.5±18.4 °C

Frequently Asked Questions

What is the CAS number of Trimethylfluorosilane?

420-56-4

What are the molecular formula and molecular weight of Trimethylfluorosilane?

C3H9FSi, molecular weight 92.188 g/mol

Data compiled from public chemical databases and supplier catalogs; verify specifications with suppliers before purchase. · Last updated: 8/21/2026