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1,1,1,3,3,3-Hexamethyldisilazane

Also known as: Hexamethyldisilazane, HMDS, Bis(trimethylsilyl)amine, 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine, Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-, DYNASYLAN HMDS, HMDZ, Silazane HMN, tsl8802

1,1,1,3,3,3-Hexamethyldisilazane (CAS 999-97-3) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C6H19NSi2 and a molecular weight of 161.393 g/mol. Key properties include a melting point of -78 °C, a boiling point of 126.0±9.0 °C at 760 mmHg, a density of 0.8±0.1 g/cm3 and a flash point of 30.0±18.7 °C. It is classified under GHS with signal word Danger and hazard statements H225 — Highly flammable liquid and vapour, H302 — Harmful if swallowed and H332 — Harmful if inhaled. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.
999-97-3
Jingsj CID
J-2845-5
Molecular Formula
C6H19NSi2
Molecular Weight
161.393 g/mol
Category
Aliphatic Hydrocarbons
Last updated
8/21/2026

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Physicochemical Properties

Melting Point-78 °C
Boiling Point126.0±9.0 °C at 760 mmHg
Density0.8±0.1 g/cm3
Flash Point30.0±18.7 °C
Exact Mass161.105606
PSA12.03000
LogP2.32
Vapor Pressure11.9±0.2 mmHg at 25°C
Refractive Index1.404
Additional PropertyREACTS

GHS Safety & Compliance

Flammable / Acute ToxicitySignal word: Danger
  • H225 — Highly flammable liquid and vapour
  • H302 — Harmful if swallowed
  • H332 — Harmful if inhaled
  • H311 — Toxic in contact with skin
  • H412 — Harmful to aquatic life with long lasting effects

Customs & Trade Information

HS Code2931900090
Summary2931900090. other organo-inorganic compounds. VAT:17.0%. Tax rebate rate:13.0%. Supervision conditions:AB(certificate of inspection for goods inward,certificate of inspection for goods outward). MFN tariff:6.5%. General tariff:30.0%

Frequently Asked Questions

What is the CAS number of 1,1,1,3,3,3-Hexamethyldisilazane?

The CAS number of 1,1,1,3,3,3-Hexamethyldisilazane is 999-97-3.

What are the molecular formula and molecular weight of 1,1,1,3,3,3-Hexamethyldisilazane?

1,1,1,3,3,3-Hexamethyldisilazane has molecular formula C6H19NSi2 and molecular weight 161.393 g/mol.

Is 1,1,1,3,3,3-Hexamethyldisilazane hazardous?

1,1,1,3,3,3-Hexamethyldisilazane has GHS signal word Danger and hazard statements H225 — Highly flammable liquid and vapour; H302 — Harmful if swallowed; H332 — Harmful if inhaled.

What are the upstream and downstream products of 1,1,1,3,3,3-Hexamethyldisilazane?

For 1,1,1,3,3,3-Hexamethyldisilazane, Upstream Products: Chlorotrimethylsilane, Bromotrimethylsilane, Bis(trimethylsilyl) sulfate; Downstream Products: trimethyl(4-nitrophenoxy)silane, Trimethylsilyl trimethylsiloxyacetate, 1-(2-Furoyl)piperazine.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated:

How to cite: Jingsj. "1,1,1,3,3,3-Hexamethyldisilazane (CAS 999-97-3)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-2845-5 (accessed 2026-11-09).

Data for reference only; verify product details with suppliers before purchase.