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Trichlorosilane

Also known as: Silicochloroform, Silane, trichloro, Trichlorosilane, 98%, Trichloromonosilane, Trichlorosilicon hydride, Trichlorohydrosilane, Trichlorsilan, Triclorosilano, Silanea-19, UNII-QZY2645L6V, MFCD00011518

Trichlorosilane (CAS 10025-78-2) is a compound in the Inorganic Chemicals category listed in the Jingsj chemical database. It has the molecular formula Cl3HSi and a molecular weight of 135.452 g/mol. Key properties include a melting point of -127 °C, a boiling point of 31.8±9.0 °C at 760 mmHg, a density of 1.342 g/mL at 25 °C(lit.) and a flash point of -13.9 °C. It is classified under GHS with signal word Danger and hazard statements H224, H250 and H302 — Harmful if swallowed. No supplier offers are currently listed; request a quote. Record last updated Nov 2, 2026.

CAS No.
10025-78-2
Jingsj CID
J-41051-1
Molecular Formula
Cl3HSi
Molecular Weight
135.452 g/mol
Category
Inorganic Chemicals
Last updated
11/2/2026

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Physicochemical Properties

Melting Point-127 °C
Boiling Point31.8±9.0 °C at 760 mmHg
Density1.342 g/mL at 25 °C(lit.)
Flash Point-13.9 °C
Exact Mass133.891312
LogP4.77
Additional Property1 (vs air)
Vapor Pressure595.7±0.1 mmHg at 25°C
Refractive Index1.4-1.402
Additional Propertydecomposes

GHS Safety & Compliance

Flammable / Corrosion / IrritantSignal word: Danger
  • H224
  • H250
  • H302 — Harmful if swallowed
  • H332 — Harmful if inhaled
  • H314 — Causes severe skin burns and eye damage

Frequently Asked Questions

What is the CAS number of Trichlorosilane?

The CAS number of Trichlorosilane is 10025-78-2.

What are the molecular formula and molecular weight of Trichlorosilane?

Trichlorosilane has molecular formula Cl3HSi and molecular weight 135.452 g/mol.

Is Trichlorosilane hazardous?

Trichlorosilane has GHS signal word Danger and hazard statements H224; H250; H302 — Harmful if swallowed.

What are the upstream and downstream products of Trichlorosilane?

For Trichlorosilane, Upstream Products: Tetrachlorosilane, Trichloro(ethyl)silane, Trichloropropylsilane; Downstream Products: Triallylsilane, hexachlorodisiloxane, Tetrachlorosilane.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated:

How to cite: Jingsj. "Trichlorosilane (CAS 10025-78-2)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-41051-1 (accessed 2026-11-06).

Data for reference only; verify product details with suppliers before purchase.