Tetrachlorosilane

四氯化硅

Also known as: (1303) SILICON CHLORIDE, Dinitride disilicon oxide, EINECS 233-054-0, MFCD00011229, MIXTUREOF86%DICHLORODIMETHYLSILANEAND14%SILICON(IV)CHLORIDE, Perchlorosilane, SAMARIUM, FOIL, SILANE, TETRACHLORO-, SILICIUMTETRACHLORID, EXTRA PURE, SILICON TETRACHLORIDE FOR SYNTHESIS, SILICON TETRACHLORIDE, REAGENT (50 ML ), SILICON(IV) CHLORIDE, Silicon oxynitride, TETRACHLORO SILANE, silicon chloride, silicon oxynitrile, tetra-chlorosilane

CAS No.
10026-04-7
Jingsj CID
J-1346408-6
Molecular Formula
Cl4Si
Chinese Name
四氯化硅
Molecular Weight
169.898 g/mol
Category
Inorganic Chemicals
Last updated
8/21/2026

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Physicochemical Properties

Melting Point−70 °C(lit.)
Boiling Point57.6±9.0 °C at 760 mmHg
Density1.5±0.1 g/cm3
Flash Point57.6°C

GHS Safety & Compliance

Corrosion / Acute ToxicitySignal word: Danger

Frequently Asked Questions

What is the CAS number of Tetrachlorosilane?

10026-04-7

What are the molecular formula and molecular weight of Tetrachlorosilane?

Cl4Si, molecular weight 169.898 g/mol

Is Tetrachlorosilane hazardous?

Danger

Data compiled from public chemical databases and supplier catalogs; verify specifications with suppliers before purchase. · Last updated: 8/21/2026