Chlorotriethoxysilane

Also known as: Triethoxychlorosilane, Chloro(triethoxy)silane, Silane, chlorotriethoxy-, Monochlorotriethoxysilane, Triethoxysilyl chloride

Chlorotriethoxysilane (CAS 4667-99-6) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C6H15ClO3Si and a molecular weight of 198.720 g/mol. Key properties include a melting point of -51°C, a boiling point of 156.0±0.0 °C at 760 mmHg, a density of 1.0±0.1 g/cm3 and a flash point of 40.1±10.8 °C. It is classified under GHS with signal word Danger and hazard statements H226 — Flammable liquid and vapour and H314 — Causes severe skin burns and eye damage. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.: 4667-99-6
Jingsj CID: J-23866-4
Molecular Formula: C₆H₁₅ClO₃Si
Molecular Weight: 198.720 g/mol
Category: Aliphatic Hydrocarbons
Last updated: 8/21/2026

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Physicochemical Properties

Melting Point	-51°C
Boiling Point	156.0±0.0 °C at 760 mmHg
Density	1.0±0.1 g/cm3
Flash Point	40.1±10.8 °C
Exact Mass	198.047897
PSA	27.69000
LogP	5.12
Appearance	liquid
Vapor Pressure	3.8±0.2 mmHg at 25°C
Refractive Index	1.416

GHS Safety & Compliance

Flammable / CorrosionSignal word: Danger

H226 — Flammable liquid and vapour
H314 — Causes severe skin burns and eye damage

Frequently Asked Questions

What is the CAS number of Chlorotriethoxysilane?

The CAS number of Chlorotriethoxysilane is 4667-99-6.

What are the molecular formula and molecular weight of Chlorotriethoxysilane?

Chlorotriethoxysilane has molecular formula C6H15ClO3Si and molecular weight 198.720 g/mol.

Is Chlorotriethoxysilane hazardous?

Chlorotriethoxysilane has GHS signal word Danger and hazard statements H226 — Flammable liquid and vapour; H314 — Causes severe skin burns and eye damage.

What are the upstream and downstream products of Chlorotriethoxysilane?

For Chlorotriethoxysilane, Upstream Products: Tetraethyl orthosilicate, Ethanol, Tetrachlorosilane; Downstream Products: Triethoxyfluorosilane, Diethoxydichlorosilane, Tetraethyl orthosilicate.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated: 8/21/2026

How to cite: Jingsj. "Chlorotriethoxysilane (CAS 4667-99-6)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-23866-4 (accessed 2026-11-09).

Data for reference only; verify product details with suppliers before purchase.