Tetrachlorosilane

Also known as: (1303) SILICON CHLORIDE, Dinitride disilicon oxide, EINECS 233-054-0, MFCD00011229, MIXTUREOF86%DICHLORODIMETHYLSILANEAND14%SILICON(IV)CHLORIDE, Perchlorosilane, SAMARIUM, FOIL, SILANE, TETRACHLORO-, SILICIUMTETRACHLORID, EXTRA PURE, SILICON TETRACHLORIDE FOR SYNTHESIS, SILICON TETRACHLORIDE, REAGENT (50 ML ), SILICON(IV) CHLORIDE, Silicon oxynitride, TETRACHLORO SILANE, silicon chloride, silicon oxynitrile, tetra-chlorosilane

Tetrachlorosilane (CAS 10026-04-7) is a compound in the Inorganic Chemicals category listed in the Jingsj chemical database. It has the molecular formula Cl4Si and a molecular weight of 169.898 g/mol. Key properties include a melting point of −70 °C(lit.), a boiling point of 57.6±9.0 °C at 760 mmHg, a density of 1.5±0.1 g/cm3 and a flash point of 57.6°C. It is classified under GHS with signal word Danger and hazard statements H301 — Toxic if swallowed, H331 — Toxic if inhaled and H314 — Causes severe skin burns and eye damage. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.

10026-04-7

Jingsj CID

J-1346408-9

Molecular Formula

Cl₄Si

Molecular Weight

169.898 g/mol

Category

Inorganic Chemicals

Last updated

8/21/2026