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Chlorotris(trimethylsilyl)silane

Also known as: tris(trimethylsilyl)chlorosilane, tris(trimethylsilyl)silyl chloride, chloro-tris(trimethylsilyl)silane, 2-chloro-1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)trisilane, 1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)-2-chlorotrisilane, Tris(trimethylsilyl) chlorosilane

Chlorotris(trimethylsilyl)silane (CAS 5565-32-2) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C9H27ClSi4 and a molecular weight of 283.106 g/mol. Key properties include a melting point of 50-52ºC(lit.), a boiling point of 225.3±23.0 °C at 760 mmHg, a density of 0.9±0.1 g/cm3 and a flash point of 63.3±17.4 °C. It is classified under GHS with signal word Danger and hazard statements H225 — Highly flammable liquid and vapour, H304 and H315 — Causes skin irritation. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.
5565-32-2
Jingsj CID
J-841450-4
Molecular Formula
C9H27ClSi4
Molecular Weight
283.106 g/mol
Category
Aliphatic Hydrocarbons
Last updated
8/21/2026
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Physicochemical Properties

Melting Point50-52ºC(lit.)
Boiling Point225.3±23.0 °C at 760 mmHg
Density0.9±0.1 g/cm3
Flash Point63.3±17.4 °C
Exact Mass282.087830
LogP6.18
Vapor Pressure0.1±0.4 mmHg at 25°C
Refractive Index1.418

GHS Safety & Compliance

Flammable / Irritant / Health HazardSignal word: Danger
  • H225 — Highly flammable liquid and vapour
  • H304
  • H315 — Causes skin irritation
  • H319 — Causes serious eye irritation
  • H335 — May cause respiratory irritation
  • H336 — May cause drowsiness or dizziness
  • H373 — May cause damage to organs through prolonged exposure

Frequently Asked Questions

What is the CAS number of Chlorotris(trimethylsilyl)silane?

The CAS number of Chlorotris(trimethylsilyl)silane is 5565-32-2.

What are the molecular formula and molecular weight of Chlorotris(trimethylsilyl)silane?

Chlorotris(trimethylsilyl)silane has molecular formula C9H27ClSi4 and molecular weight 283.106 g/mol.

Is Chlorotris(trimethylsilyl)silane hazardous?

Chlorotris(trimethylsilyl)silane has GHS signal word Danger and hazard statements H225 — Highly flammable liquid and vapour; H304; H315 — Causes skin irritation.

What are the upstream and downstream products of Chlorotris(trimethylsilyl)silane?

For Chlorotris(trimethylsilyl)silane, Upstream Products: Tris(trimethylsilyl)silane, Benzenesulfonyl chloride, tetrakis(trimethylsilyl)silane; Downstream Products: Tris(trimethylsilyl)silane.

Data compiled from public chemical databases such as PubChem and supplier catalogs; supplier offers are provided by suppliers.

Last updated:

How to cite: Jingsj. "Chlorotris(trimethylsilyl)silane (CAS 5565-32-2)". Jingsj Chemical Database. https://www.jingsj.com/compound/J-841450-4 (accessed 2026-11-09).

Data for reference only; verify product details with suppliers before purchase.