Chlorotris(trimethylsilyl)silane

氯三(三甲基甲硅烷基)硅烷

Also known as: tris(trimethylsilyl)chlorosilane, tris(trimethylsilyl)silyl chloride, chloro-tris(trimethylsilyl)silane, 2-chloro-1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)trisilane, 1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)-2-chlorotrisilane, Tris(trimethylsilyl) chlorosilane

Chlorotris(trimethylsilyl)silane (CAS 5565-32-2) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C9H27ClSi4 and a molecular weight of 283.106 g/mol. It is also known as tris(trimethylsilyl)chlorosilane, tris(trimethylsilyl)silyl chloride and chloro-tris(trimethylsilyl)silane. Key properties include a melting point of 50-52ºC(lit.), a boiling point of 225.3±23.0 °C at 760 mmHg, a density of 0.9±0.1 g/cm3 and a flash point of 63.3±17.4 °C. GHS signal word: Danger. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.

5565-32-2

Jingsj CID

J-841450-2

Molecular Formula

C₉H₂₇ClSi₄

Chinese Name

氯三(三甲基甲硅烷基)硅烷

Molecular Weight

283.106 g/mol

Category

Aliphatic Hydrocarbons

Last updated

8/21/2026