Tris(trimethylsilyl) phosphate
三(三甲基硅基)磷酸酯
Also known as: Phosphoric acid tris(trimethylsilyl) ester, Phosphoric acid, TMS, Phosphoric acid, triTMS, Phosphoric acid, tristrimethylsilyl, Silanol, trimethyl-, phosphate (3:1), Trimethyl silyl phosphate, TMSP
- CAS No.
- 10497-05-9
- Jingsj CID
- J-6724-9
- Molecular Formula
- C9H27O4PSi3
- Chinese Name
- 三(三甲基硅基)磷酸酯
- Molecular Weight
- 314.53900 g/mol
- Category
- Organic Acids
- Last updated
- 8/21/2026
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Request a quotePhysicochemical Properties
| Melting Point | 3-4 °C(lit.) |
|---|---|
| Boiling Point | 228-229 °C720 mm Hg(lit.) |
| Density | 0.945 g/mL at 25 °C(lit.) |
| Flash Point | 76 °F |
GHS Safety & Compliance
Flammable / IrritantSignal word: Danger
Frequently Asked Questions
What is the CAS number of Tris(trimethylsilyl) phosphate?
10497-05-9
What are the molecular formula and molecular weight of Tris(trimethylsilyl) phosphate?
C9H27O4PSi3, molecular weight 314.53900 g/mol
Is Tris(trimethylsilyl) phosphate hazardous?
Danger
Data compiled from public chemical databases and supplier catalogs; verify specifications with suppliers before purchase. · Last updated: 8/21/2026