Tris(trimethylsiloxy)silane

三(三甲硅烷氧基)硅烷

Also known as: 1,1,1,5,5,5-Hexamethyl-3-(trimethylsilyloxy)trisiloxane, 1,1,1,5,5,5-Hexamethyl-3-[(trimethylsilyl)oxy]trisiloxane, 1,1,5,5,5-hexamethyl-3-[(trimethylsilyl)oxy]trisiloxane, TRIS(TRIMETHYLSILYLOXY)SILANE, TRIS(TRIMETHYLSILOXY)SILANE, tris(trimethylsilyloxy)silicon, 1,1,1,5,5,5-Hexamethyl-3-(trimethylsiloxy)pentanetrisiloxane, 1,1,1,5,5,5-Hexamethyl-3-[(trimethylsilyl)oxy]pentanetrisiloxane, 3-Hydrogen-1,1,1,5,5,5-hexamethyl-3-trimethylsiloxytrisiloxane, 2,2,6,6-tetramethyl-4-trimethylsiloxy-2,4,6-trisila-3,5-dioxaheptane, EINECS 217-497-7, MFCD00054865

Tris(trimethylsiloxy)silane (CAS 1873-89-8) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C9H28O3Si4 and a molecular weight of 296.659 g/mol. It is also known as 1,1,1,5,5,5-Hexamethyl-3-(trimethylsilyloxy)trisiloxane, 1,1,1,5,5,5-Hexamethyl-3-[(trimethylsilyl)oxy]trisiloxane and 1,1,5,5,5-hexamethyl-3-[(trimethylsilyl)oxy]trisiloxane. Key properties include a melting point of <0ºC, a boiling point of 185.0±0.0 °C at 760 mmHg, a density of 0.85 and a flash point of 55.0±0.0 °C. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.

1873-89-8

Jingsj CID

J-6704-7

Molecular Formula

C₉H₂₈O₃Si₄

Chinese Name

三(三甲硅烷氧基)硅烷

Molecular Weight

296.659 g/mol

Category

Aliphatic Hydrocarbons

Last updated

8/21/2026