Tris(dimethylamino)chlorosilane

三(二甲氨基)氯硅烷

Also known as: Chlorotris(dimethylamino)silane, Chlorotri(dimethylamino)silane, 1-chloro-N,N,N',N',N'',N''-hexamethylsilanetriamine, N-[chloro-bis(dimethylamino)silyl]-N-methylmethanamine, Silanetriamine, 1-chloro-N,N,N',N',N'',N''-hexamethyl-, Si(N(CH3)2)3Cl, EINECS 236-331-4, MFCD00048004, Chlor-tris-dimethylamino-silan, chloro-tris-dimethylamino-silane

Tris(dimethylamino)chlorosilane (CAS 13307-05-6) is a compound in the Aliphatic Hydrocarbons category listed in the Jingsj chemical database. It has the molecular formula C6H18ClN3Si and a molecular weight of 195.766 g/mol. It is also known as Chlorotris(dimethylamino)silane, Chlorotri(dimethylamino)silane and 1-chloro-N,N,N',N',N'',N''-hexamethylsilanetriamine. Key properties include a boiling point of 173.2±9.0 °C at 760 mmHg, a density of 1.0±0.1 g/cm3 and a flash point of 58.6±18.7 °C. GHS signal word: Danger. No supplier offers are currently listed; request a quote. Record last updated Aug 21, 2026.

CAS No.

13307-05-6

Jingsj CID

J-26635-2

Molecular Formula

C₆H₁₈ClN₃Si

Chinese Name

三(二甲氨基)氯硅烷

Molecular Weight

195.766 g/mol

Category

Aliphatic Hydrocarbons

Last updated

8/21/2026